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PRODUCT
우수 인재와 혁신 기술로 고객 가치를 실현하는 파트너 기업

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High-precision stage Ⅰ single plane air bearing Stage

·Air bearing & Magnetic Preload Stage for Lithography

·Straightness of Scan : ±2㎛@1,800mm

·Yaw of Scan : <±0.65arcsec@1,800mm

·Resolution : 1.5mm (Controller : PowerPmac, Delta tau, USA) 


 Item

Spec.

 Guide

Air Bearing

Repeatability

< ±0.4㎛

Straightness of Scan

< ±2㎛@1,800mm 

Straightness of Scan

< ±0.7㎛@850mm 

Yaw of Scan 

<±0.65arcsec@1,800mm 

In-position Stability

< ±0.1㎛

Speed Ripple

< ±0.25%@35mm/s 

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